SECS/GEM¶

Characteristics - SECS/GEM¶

The SECS/GEM is the semiconductor’s equipment interface protocol for equipment-to-host data communications. In an automated fab, the interface can start and stop equipment processing, collect measurement data, change variables and select recipes for products. To learn more about the standard visit the SECS/GEM section in Wikipedia website.

Information Model Requirements

• The first Node after the root node can be of type Event , Command or Variable

• The following Node Types can be used under the Event Node:

  • Variables with a Simple Data Type represents the key-value pairs.

  • Variables with a Custom Data Type represent objects that can contain key-value pairs.

Configuration - SECS/GEM Client¶

1. Select Secs Gem Client as Channel Type.

2. Click the Configure button.

3. Make sure the root model node is selected to configure the SECS/GEM Client

4. Enter the device configuration:

• input the equipment-to-host Ip address

• type in the TCP Port for the communication

• input the Device Id

5. Enter the Data Formats

• Input CEID - format for event Ids

• Enter RPTID - format for report Ids

• Input ALID - format for alarm Ids

6. Input timeout for:

• T3 - Reply Timeout in the HSMS protocol.

• T5 - Connect Separation Timeout in the HSMS protocol used to prevent excessive TCP/IP connect activity by providing a minimum time between the breaking, by an entity, of a TCP/IP connection or a failed attempt to establish one, and the attempt, by that same entity, to initiate a new TCP/IP connection.

• T6 - Control Timeout in the HSMS protocol which defines the maximum time an HSMS control transaction can remain open before a communications failure is considered to have occurred. A transaction is considered open from the time the initiator sends the required request message until the response message is received.

• T7 - Connection Idle Timeout in the HSMS protocol which defines the maximum amount of time which may transpire between the formation of a TCP/IP connection and the use of that connection for HSMS communications before a communications failure is considered to have occurred.

• T8 - Network Intercharacter Timeout in the HSMS protocol which defines the maximum amount of time which may transpire between the receipt of any two successive bytes of a complete HSMS message before a communications failure is considered to have occurred.

7. Select the logging type for the required Node Types:

• Check the Enable box

• Check the Log Data box

8. Click on the Apply button

9. Select the Event node to configure the event context

10. Click to check the Events box

11. Enter the event context Id which will trigger the event in the Information Model

12. Click on the Apply button

13. Select the variable in the tree

14. Click to check the variables box and configure the Secs variable context

    • select the variable Type

    • enter the variable Id

    • click the Is SV box to check if the variable is a SV

    • input the variable Name

Description of configuration properties: